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US 2020/0370164 A1Published application
Method for producing amorphous thin film
AssigneeLG Chem, Ltd.
InventorsJung Hwan YOON, Bu Gon SHIN, Jeong Ho PARK, Eun Kyu HER, So Young CHOO, Yeon Jae YOO
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Abstract
The present invention relates to a method for forming an amorphous layer on one surface of a second substrate through a simple method of performing laser irradiation on a multilayered metal layer provided on a first substrate.
Claims15
A method for producing an amorphous thin film, the method comprising:
- forming on a first substrate a multilayered metal layer having a first metal layer, a second metal layer, and a third metal layer by sequentially depositing a first metal, a second metal, and a third metal on one surface of the first substrate;
- providing one surface of a second substrate to face the multilayer metal layers;
- and
- forming an amorphous metal layer comprising the first metal, the second metal, and the third metal on the one surface of the second substrate by irradiating the other surface of the first substrate with a laser in a direction from the other surface to the one surface of the first substrate.
1 more element
Dependencies are inferred from the claim text.