Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization

An apparatus for initiated vapor polymerization surface coating by grid-controlled plasma, comprising a vacuum chamber divided into a discharging cavity and a processing chamber by a metal mesh grid;

• wherein the metal mesh grid is connected with a pulse bias power supply by a current sensor;
• the metal mesh grid is insulated from the vacuum chamber;
• the current sensor measures a waveform of a current pulse and feeds it back to the pulse bias power supply;
• wherein the discharging cavity in which plasma is generated is respectively connected with a carrier gas pipeline flowing carrier gas into the discharging cavity and a filament electrode;
• the filament electrode is connected with a power supply;
• wherein a side of the processing chamber away from the discharging cavity, where a to-be-processed base material is placed, is connected with one end of an exhaust pipe;
• the other end of the exhaust pipe is connected with a vacuum pump;
• a side of the processing chamber which is near the discharging cavity is directly connected with a monomer vapor pipeline flowing monomer vapor into the processing chamber, wherein the monomer vapor pipeline includes an outlet directly in the processing chamber, which is configured to not have a filament electrode, to feed the monomer vapor, and the metal mesh grid is separately provided from the outlet of the monomer vapor pipeline;
• wherein the processing chamber is connected with a vacuum exhaust hole;
• and
• wherein the pulse bias power supply generates positive pulse bias applying on the metal mesh grid and adjusts a potential of the metal mesh grid to control and release the plasma entering the processing chamber to initiate the monomer vapor to polymerize and deposit on a surface of the to-be-processed base material to form a polymer coating.