Filtering device, purification device, and method for manufacturing chemical liquid
AssigneeFUJIFILM Corporation
InventorsTadashi OMATSU, Tetsuya KAMIMURA, Tetsuya SHIMIZU, Satomi TAKAHASHI
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Abstract
A filtering device for obtaining a chemical liquid by purifying a liquid to be purified has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group.
Claims24
A filtering device for obtaining a chemical liquid by purifying a liquid to be purified, the filtering device comprising:
- an inlet portion;
- an outlet portion;
- a filter A;
- at least one filter B different from the filter A;
- and
- a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion,
- wherein the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group.
A method for manufacturing a chemical liquid by purifying a liquid to be purified, the method comprising:
- a step of filtering the liquid to be purified by using a filter A including a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group and a filter B different from the filter A so as to obtain a chemical liquid.
Dependencies are inferred from the claim text.