Methods and systems for adsorbing organometallic vapor
AssigneeEntegris, Inc.
InventorsCharles H. APPLEGARTH, Rocky D. GIPSON, Sarah VOGT, Joshua T. COOK, Matthew BROWNING, Marco HOLZNER
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Abstract
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
Claims20
A method of removing gaseous organometallic vapor from a gas mixture comprising the organometallic vapor and a non-organometallic vapor, the method comprising passing the gas mixture through a solid adsorbent and adsorbing the organometallic vapor onto the solid adsorbent.
A method of filtering a gas mixture comprising organometallic vapor, particles, and non-organometallic vapor, the method comprising:
- reducing a temperature of the gas mixture by passing the gas mixture through a heat exchanger to produce a cooled gas mixture;
- passing the cooled gas mixture through a particle filter to substantially remove particles;
- and
- passing the cooled gas mixture with substantially removed particles through a solid adsorbent to adsorb organometallic vapor onto the solid adsorbent.
A system for filtering a gas mixture comprising organometallic vapor, particles, and non-organometallic vapor, the system comprising:
- a heat exchanger,
- a particle filter, and
- a solid adsorbent,
- the system arranged to allow flow of the gas mixture through the heat exchanger to cool the gas mixture, through the particle filter to remove particles from the gas mixture, and through the solid adsorbent to remove organometallic vapor from the gas mixture.
Dependencies are inferred from the claim text.