Radiation-sensitive composition and pattern-forming method
AssigneeJsr Corporation
InventorsShinya MINEGISHI, Motohiro SHIRATANI, Hisashi NAKAGAWA
Life of this patent
Estimating the term…
Abstract
A radiation-sensitive composition contains: a metal oxide having a first structural unit represented by formula (1), formula (2) or a combination thereof, and a second structural unit represented by formula (3); and a solvent. In the formulae (1) to (3), M1, M2 and M3 each independently represent germanium, tin or lead; and R1, R2 and R3 each independently represent a monovalent organic group having 1 to 40 carbon atoms which bonds to M1 or M2 via a carbon atom. A proportion of the first structural unit with respect to total structural units constituting the metal oxide is preferably no less than 50 mol %.
Claims9
A radiation-sensitive composition comprising:
- a metal oxide comprising a first structural unit represented by formula (1), formula (2) or a combination thereof, and a second structural unit represented by formula (3);
- and
- a solvent,
- wherein,
- in the formulae (1) and (2), M1 and M2 each independently represent germanium, tin or lead;
- and R1, R2 and R3 each independently represent a monovalent organic group having 1 to 40 carbon atoms which bonds to M1 or M2 via a carbon atom, and
- (M3O4/2) (3)
- in the formula (3), M3 represents germanium, tin or lead.
Dependencies are inferred from the claim text.