Diaphragm valves, valve components, and methods for forming valve components
AssigneeASM IP Holding B.V.
InventorJohn Kevin Shugrue
Life of this patent
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AssigneeASM IP Holding B.V.
InventorJohn Kevin Shugrue
Estimating the term…
A diaphragm valve is disclosed. The diaphragm valve may include, a valve body comprising a valve channel, the valve channel including an inlet channel and an outlet channel. The diaphragm valve may also include, a valve seat adjacent to the valve channel and a flexible diaphragm comprising a wetted surface and an opposing non-wetted surface, the flexible diaphragm being disposed adjacent to the valve channel. The diaphragm valve may also include, a flexible heater disposed over the non-wetted surface of the flexible diaphragm, and a valve actuator that is operable to operable to move the wetted surface of the flexible diaphragm into and out of contact with the valve seat. Valve components including a flexible heater and methods for forming such valve components are also disclosed.
A method for forming a valve component, comprising:
Dependencies are inferred from the claim text.