US 2020/0350511 A1 · DISPLAY PANEL AND FABRICATION METHOD THEREOF

Abstract

A display panel and a fabrication method for forming the display panel are provided. The fabrication method includes providing a substrate disposed with a light-emitting device, and forming a first inorganic material layer. The fabrication method also includes forming a first inorganic layer by thinning the first inorganic material layer, and forming a second inorganic layer. Moreover, the fabrication method includes forming a third layer. The third layer is disposed in a first region. Further, the fabrication method includes patterning the first inorganic layer and the second inorganic layer by a dry etching using the third layer as a mask, while simultaneously thinning the third layer. The first inorganic layer and the second inorganic layer in the first region are retained to form a first inorganic encapsulation layer and a second inorganic encapsulation layer, respectively. The third layer is thinned to form a third encapsulation layer.

Claims19

Dependent claims

A fabrication method for forming a display panel, comprising:

providing a substrate disposed with a light-emitting device;
forming a first inorganic material layer;
forming a first inorganic layer by thinning the first inorganic material layer;
forming a second inorganic layer;
forming a third layer, wherein the third layer is disposed in a first region;
and
patterning the first inorganic layer and the second inorganic layer by a dry etching using the third layer as a mask, while simultaneously thinning the third layer, wherein:
the first inorganic layer in the first region is retained to form a first inorganic encapsulation layer,
the second inorganic layer in the first region is retained to form a second inorganic encapsulation layer, and
the third layer is thinned to form a third encapsulation layer.

7 more elements

Dependencies are inferred from the claim text.

Display panel and fabrication method thereof

Life of this patent

Display panel and fabrication method thereof

Life of this patent

Abstract

Claims19