Low temperature biasable substrate support
AssigneeApplied Materials, Inc.
InventorsBrian T. WEST, Soundarrajan JEMBULINGAM, Dinkesh HUDERI SOMANNA
Life of this patent
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Abstract
Embodiments described herein relate to a substrate support and techniques for controlling a temperature of the same. The substrate support includes a heating element and an over temperature switch disposed therein. The heating element heats the substrate support and a substrate disposed thereon. The over temperature switch controls a temperature of the heating element and the substrate support. The over temperature switch is operable to switch states in response to a temperature of the substrate support exceeding a predefined temperature.
Claims20
A substrate support comprising:
- a body having a heating element;
- and
- an over temperature switch disposed in the substrate support and operable to switch states in response to detecting a temperature which exceeds a predefined temperature.
A substrate support comprising:
- a body having a heating element disposed therein;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the body;
- a recess formed in the second surface of the cooling plate;
- an opening formed through the cooling plate;
- a central insulator disposed in the opening;
- an over temperature switch disposed in the recess and operable to switch states in response to the cooling plate exceeding a predefined temperature;
- and
- an electrical insulator disposed between the recess and the over temperature switch.
A substrate support comprising:
- a body;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the body;
- a recess formed in the second surface of the cooling plate;
- an opening formed through the cooling plate;
- a central insulator disposed in the opening;
- an over temperature switch disposed in the recess and operable to switch states in response to the cooling plate exceeding a predefined temperature;
- one or more grooves formed in the central insulator;
- one or more low voltage cables coupled to the over temperature switch and at least partially disposed in the grooves;
- and
- an electrical insulator disposed between the recess and the over temperature switch.
Dependencies are inferred from the claim text.