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US 2020/0350189 A1Published application
Heating device
AssigneeNissin Ion Equipment Co., Ltd.
InventorMasakazu ADACHI
Life of this patent
Estimating the term…
Abstract
A heating device is provided. The heating device includes a conveyance member, first and second support members, and a heat reflecting plate. The first support member is provided on the conveyance member and supports a substrate during movement of the conveyance member. The second support member includes a heater and supports the substrate during processing of the substrate. The heat reflecting plate travels with the conveyance member and reflects heat from the heater toward the substrate.
Claims20
A heating device comprising:
- a conveyance member;
- a first support member that is provided on the conveyance member and that supports a substrate during movement of the conveyance member;
- a second support member that includes a heater and that supports the substrate during processing of the substrate;
- and
- a heat reflecting plate that travels with the conveyance member and that reflects heat from the heater toward the substrate.
2 more elements
A heating device comprising:
- an arm having a substrate support that supports a substrate attached thereto;
- a heater operable to heat a surface of the substrate;
- and
- a heat reflecting plate formed of a portion of the arm that is opposite to the substrate.
1 more element
Dependencies are inferred from the claim text.