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AssigneeShanghai Micro Electronics Equipment (Group) Co., Ltd.
InventorsShiliang LU, Hang RAN, Yihui LI, Xiaoping YAN, Jun ZHAO, Shanshan CHEN
Estimating the term…
A spin coating device and method. The spin coating device includes a rotatable rotary shaft and sucker fixed on an end portion of the shaft, and an electromagnetic induction device below the sucker which includes an annular magnet fixed below the sucker, coil group formed by a first and second coil, and strip-shaped magnet fixed at the rotary shaft. A base on the sucker has a notch. The unbalanced centrifugal force during rotation of the sucker causes vibration. The electromagnetic induction device enables the centrifugal force generated during rotation of the sucker to be in balance with the magnetic force generated by the electromagnetic induction device to adjust the levelness of the sucker surface. The device does not need manual manipulation, enables the sucker to be more stable, reduces damage to the equipment due to vibration, and improves the effect of photoresist spin-coating while saving time and labor.
A spin coating apparatus, comprising a rotatable shaft and a chuck secured at an end portion of the shaft, the shaft configured to, when rotating, drive the chuck to rotate, wherein an electromagnetic induction device is disposed under the chuck, so that a centrifugal force generated by a rotation of the chuck is brought in balance with a magnetic force generated by the electromagnetic induction device to adjust a surface levelness of the chuck.
Dependencies are inferred from the claim text.