Method and chamber for backside physical vapor deposition

A method of depositing a backside film layer on a backside of a substrate, comprising:

• loading the substrate into a factory interface of a cluster tool, the substrate having a front side and a backside, the front side having an active region;
• flipping the substrate at the factory interface so that the backside is facing up;
• transferring the flipped substrate from the factory interface to a physical vapor deposition chamber;
• and
• depositing the backside film layer on the backside of the substrate, wherein:
• the backside film layer is formed from sputtering from a sputter target, and
• the backside film layer is deposited by providing DC power to the sputter target.

A cluster tool for depositing a backside film layer on a backside of a substrate, comprising:

• a physical vapor deposition chamber having a chamber lid and one or more sidewalls, comprising:
• a processing region bounded at least partially by the chamber lid and the one or more sidewalls;
• a sputter target having a first surface that is in contact with the processing region and a second surface that is opposite the first surface;
• a power source coupled to the sputter target;
• a substrate support having a substrate supporting surface facing the sputter target, the substrate supporting surface configured to support the substrate at or near the periphery of the substrate supporting surface without contacting an active region on a front side of the substrate, such that the backside of the substrate is exposed to the sputter target;
• a shadow mask disposed above the substrate support, the shadow mask defining a deposition area on the backside of the substrate;
• a gas conduit disposed in the sidewall of the physical vapor deposition chamber;
• and
• a magnetron disposed adjacent to the second surface of the sputter target, wherein the magnetron comprises:
• an inner pole comprising an inner plurality of magnets;
• and
• an outer pole surrounding the inner pole, the outer pole comprising an outer plurality of magnets.