Graphene and glassy carbon meta-material, microfabrication method, and energy storage device
AssigneeSan Diego State University Research Foundation
InventorsSamuel K. Kassegne, Elisa Castagnola, Surabhi Nimbalkar
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Abstract
A meta-material is disclosed that includes a first layer composed of graphene, and one or more additional layers, each composed of glassy carbon or graphene. A method of producing an engineered material includes depositing a graphene precursor on a substrate, pyrolyzing the graphene precursor to allow the formation of graphene, depositing a glassy carbon precursor the graphene, pyrolyzing to allow the formation of glassy carbon from the glassy carbon precursor, depositing a graphene precursor on the glassy carbon, and pyrolyzing the graphene precursor to allow the formation of graphene.
Claims18
An engineered material comprising:
- a first layer comprising graphene;
- a second layer comprising glassy carbon;
- a third layer comprising glassy carbon;
- a fourth layer comprising graphene;
- and
- a fifth layer comprising polyimide.
An engineered material comprising:
- a first layer comprising graphene;
- a second layer comprising glassy carbon;
- and
- a third layer comprising a silicon substrate.
A method for fabricating an engineered material comprising graphene and glassy carbon, the method comprising:
- depositing a first metal layer on a silicon wafer;
- depositing a first graphene precursor on the first metal layer;
- pyrolyzing the first graphene precursor layer to allow the formation of a first graphene layer;
- depositing a glassy carbon precursor layer on the first graphene layer;
- pyrolyzing the glassy carbon precursor layer to allow the formation of a glassy carbon layer;
- and
- etching to remove the first metal layer.
Dependencies are inferred from the claim text.