Methods and Systems for Fabricating High Quality Superconducting Tapes
AssigneeUniversity of Houston System
InventorsGoran Majkic, Venkat Selvamanickam
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Abstract
An MOCVD system fabricates high quality superconductor tapes with variable thicknesses. The MOCVD system can include a gas flow chamber between two parallel channels in a housing. A substrate tape is heated and then passed through the MOCVD housing such that the gas flow is perpendicular to the tape's surface. Precursors are injected into the gas flow for deposition on the substrate tape. In this way, superconductor tapes can be fabricated with variable thicknesses, uniform precursor deposition, and high critical current densities.
Claims9
A method of fabricating a superconductor tape by metal organic chemical vapor deposition, the method comprising:
- heating a superconductor substrate tape via ohmic heating;
- and
- laminarly flowing at least one superconductor precursor in a gas phase such that the at least one precursor thermally decomposes upon contact with the heated superconductor substrate tape thereby forming a superconductor film;
- wherein the above method steps result in the superconductor tape comprising the superconductor film having a thickness greater than approximately 2 μm and non c-axis grain orientation less than approximately 10% and a critical current density greater than approximately 4 MA/cm2 at 77 K in a zero applied magnetic field.
Dependencies are inferred from the claim text.