Pressure compensation chamber
AssigneeFas Medic S.A.
InventorsDavide AZZONI, Manuel Diaz, Teddy Blampey
Life of this patent
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Abstract
There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.
Claims23
A fluid sensing apparatus comprising:
- a fluid flow channel having an inlet and an outlet;
- at least one fluid conduit in fluid communication with the fluid flow channel;
- a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing;
- a pressure compensation chamber in which the casing of the fluid sensor is enclosed;
- and
- at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel,
- wherein the at least one pressure compensation conduit extends between the pressure compensation chamber and a location along the fluid flow channel such that fluid flowing along the fluid flow channel at the location of the at least one pressure compensation conduit during use enters the pressure compensation chamber via the at least one pressure compensation conduit, and
- wherein the at least one fluid conduit extends between the at least one sensor port and a location along the fluid flow channel such that fluid flowing along the fluid flow channel at the location of the at least one fluid conduit during use enters the casing of the fluid sensor via the at least one fluid conduit.
(canceled)
Dependencies are inferred from the claim text.