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US 2020/0348595 A1Published application
Composition, film, and production method of patterned substrate
AssigneeJsr Corporation
InventorsShin-ya NAKAFUJI, Kengo EHARA, Tomoaki TANIGUCHI, Kazunori TAKANASHI
Life of this patent
Estimating the term…
Abstract
A composition contains: a compound including at least one group selected from the group consisting of a group represented by formula (1-1), a group represented by formula (1-2), and a group represented by formula (1-3); and a solvent. In formulae (1-1) to (1-3), * and ** each denote a site bonding to a part other than the group represented by the formulae (1-1) to (1-3) in the compound; and a and b are each independently an integer of 0 to 3. In a case in which a is 0, b is no less than 1, and in a case in which a is no less than 1, b is 0.
Claims11
A composition comprising:
- a compound comprising at least one group selected from the group consisting of a group represented by formula (1-1), a group represented by formula (1-2), and a group represented by formula (1-3), the compound having a molecular weight of no greater than 3,000;
- and
- a solvent,
- wherein,
- in the formulae (1-1) to (1-3), * and ** each denote a site bonding to a part other than the group represented by the formulae (1-1) to (1-3) in the compound;
- and a and b are each independently an integer of 0 to 3, wherein in a case in which a is 0, b is no less than 1, and in a case in which a is no less than 1, b is 0,
- in the formula (1-1), Ar1A represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p1+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p1+1);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p1 is an integer of 0 to 11, wherein in a case in which p1 is no less than 2, a plurality of R1s are identical or different;
- Ar2A represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (b+q1+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q1+1);
- R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- q1 is an integer of 0 to 11, wherein in a case in which q1 is no less than 2, a plurality of R2s are identical or different;
- a sum of p1 and a is no greater than 11;
- and a sum of q1 and b is no greater than 11,
- in the formula (1-2), Ar1B represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p2+2), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p2+2);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p2 is an integer of 0 to 10, wherein in a case in which p2 is no less than 2, a plurality of R1s are identical or different;
- Ar2B represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (b+q2+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q2+1);
- q2 is an integer of 0 to 11, wherein in a case in which q2 is 1, R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms, and in a case in which q2 is no less than 2, a plurality of R2s are identical or different, and each R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms, and optionally two or more of the plurality of R2s taken together represent a ring structure having 4 to 20 ring atoms together with the atom chain to which the two or more of the plurality of R2s bond;
- a sum of p2 and a is no greater than 10;
- and a sum of q2 and b is no greater than 11, and
- in the formula (1-3), Ar1C represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p3+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p3+1);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p3 is an integer of 0 to 11, wherein in a case in which p3 is no less than 2, a plurality of R1s are identical or different;
- Ar2C represents an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q3+1);
- R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- q3 is an integer of 0 to 11, wherein in a case in which q3 is no less than 2, a plurality of R2s are identical or different;
- a sum of p3 and a is no greater than 11;
- and a sum of q3 and b is no greater than 11.
26 more elements
A production method of a patterned substrate, the production method comprising:
- applying a composition directly or indirectly on at least an upper face of a substrate, to form a resist underlayer film, the composition comprising:
- a compound comprising at least one group selected from the group consisting of a group represented by formula (1-1), a group represented by formula (1-2), and a group represented by formula (1-3), the compound having a molecular weight of no greater than 3,000;
- and a solvent;
- forming a resist pattern on an upper face side of the resist underlayer film;
- and
- carrying out etching using the resist pattern as a mask,
- wherein,
- in the formulae (1-1) to (1-3), * and ** each denote a site bonding to a part other than the group represented by the formulae (1-1) to (1-3) in the compound;
- and a and b are each independently an integer of 0 to 3, wherein in a case in which a is 0, b is no less than 1, and in a case in which a is no less than 1, b is 0,
- in the formula (1-1), Ar1A represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p1+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p1+1);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p1 is an integer of 0 to 11, wherein in a case in which p1 is no less than 2, a plurality of R1s are identical or different;
- Ar2A represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (b+q1+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q1+1);
- R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- q1 is an integer of 0 to 11, wherein in a case in which q1 is no less than 2, a plurality of R2s are identical or different;
- a sum of p1 and a is no greater than 11;
- and a sum of q1 and b is no greater than 11,
- in the formula (1-2), Ar1B represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p2+2), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p2+2);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p2 is an integer of 0 to 10, wherein in a case in which p2 is no less than 2, a plurality of R1s are identical or different;
- Ar2B represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (b+q2+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q2+1);
- q2 is an integer of 0 to 11, wherein in a case in which q2 is 1, R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms, and in a case in which q2 is no less than 2, a plurality of R2s are identical or different, and each R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms, and optionally two or more of the plurality of R2s taken together represent a ring structure having 4 to 20 ring atoms together with the atom chain to which the two or more of the plurality of R2s bond;
- a sum of p2 and a is no greater than 10;
- and a sum of q2 and b is no greater than 11, and
- in the formula (1-3), Ar1C represents an aromatic carbocyclic group having 6 to 20 ring atoms and having a valency of (a+p3+1), or an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (a+p3+1);
- R1 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- p3 is an integer of 0 to 11, wherein in a case in which p3 is no less than 2, a plurality of R1s are identical or different;
- Ar2C represents an aromatic heterocyclic group having 5 to 20 ring atoms and having a valency of (b+q3+1);
- R2 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms;
- q3 is an integer of 0 to 11, wherein in a case in which q3 is no less than 2, a plurality of R2s are identical or different;
- a sum of p3 and a is no greater than 11;
- and a sum of q3 and b is no greater than 11.
29 more elements
Dependencies are inferred from the claim text.