Framework for a replication device, replication device as well as method for producing nanostructured and/or microstructured components by means of a replication device
AssigneeSuss Microtec Lithography GmbH
InventorsRaoul KIRNER, Wilfried NOELL, Andreas NAGY
Life of this patent
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Abstract
A framework for a replication device for producing nanostructured and/or microstructured components forms a gimbal suspension. In addition, a replication device is provided including such a framework. Further, a method is described for producing nanostructured and/or microstructured components by imprint lithography using a replication device.
Claims20
A framework for a replication device for producing at least one of nanostructured and microstructured components, comprising a fixture, a first frame and a second frame,
- wherein the first frame is connected to the fixture by a first joint, wherein the first joint defines a first rotational axis about which the first frame is pivotable relative to the fixture,
- wherein the second frame is connected to the first frame by a second joint, wherein the second joint defines a second rotational axis about which the second frame is pivotable relative to the first frame,
- wherein the second frame comprises a holder for least one of a stamp, a mask and substrate.
A replication device comprising a framework comprising a fixture, a first frame and a second frame,
- wherein the first frame is connected to the fixture by a first joint, wherein the first joint defines a first rotational axis about which the first frame is pivotable relative to the fixture,
- wherein the second frame is connected to the first frame by a second joint, wherein the second joint defines a second rotational axis about which the second frame is pivotable relative to the first frame,
- wherein the second frame comprises a holder for least one of a stamp, a mask and substrate.
A method for producing least one of nanostructured and microstructured components by a lithographic method using a replication device, comprising the following steps:
- a) providing a substrate
- b) providing a stamp in a holder of the replication device,
- c) moving least one of the stamp and the holder and the substrate towards each other relatively so that the stamp and the substrate occupy a parallel position to each other and a replication material provided between the stamp and the substrate is imprinted by the stamp, and
- d) detaching the stamp, wherein the stamp is least one of prestressed and moved in a direction from the parallel position by a force.
Dependencies are inferred from the claim text.