Layered structure with high dielectric constant for use with active matrix backplanes
AssigneeE Ink Corporation
InventorsCristina VISANI, Stephen J. TELFER, Kosta LADAVAC, Kenneth R. CROUNSE, Timothy J. O'MALLEY, Teck Ping SIM
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Abstract
Layered dielectric materials for use in controlling dielectric strength in microelectronic devices, especially as they relate to electrophoretic and electrowetting applications. Specifically, a combination of a first atomic layer deposition (ALD) step, a sputtering step, and a second ALD step result in a layer that is chemically robust and nearly pinhole free. The dielectric layer may be disposed on the transparent common electrode of an electrophoretic display or covering the pixelated backplane electrodes, or both.
Claims20
A layered dielectric comprising:
- a first layer including an aluminum oxide or a hafnium oxide, the first layer having a thickness between 9 nm and 80 nm;
- a second layer including a tantalum oxide or a hafnium oxide, the second layer having a thickness between 40 nm and 250 nm;
- and
- a third layer including a tantalum oxide or a hafnium oxide, the third layer having a thickness between 5 nm and 60 nm, wherein the second layer is disposed between the first and third layers.
A method of creating a layered dielectric comprising:
- providing a substrate;
- depositing a first layer including aluminum oxide or hafnium oxide using atomic layer deposition, the first layer having a thickness between 9 nm and 80 nm;
- depositing a second layer including tantalum oxide or hafnium oxide using sputtering, the second layer having a thickness between 40 nm and 250 nm;
- and
- depositing a third layer including tantalum oxide or hafnium oxide using atomic layer deposition, the third layer having a thickness between 5 nm and 60 nm.
An electrophoretic display including:
- a light-transmissive electrode;
- a dielectric layer;
- an electrophoretic layer comprising a first set of light-scattering particles and two additional sets of particles having different optical characteristics from each other and from the first set of light-scattering particles;
- and
- a rear electrode.
A method of driving an electrophoretic display with a DC-unbalanced waveform, comprising:
- providing an electrophoretic display including:
- a light-transmissive electrode;
- a dielectric layer;
- an electrophoretic layer;
- and
- a rear electrode;
- providing a voltage source;
- and
- driving the electrophoretic layer with a DC-unbalanced waveform that includes both a driving portion and a grounding portion.
Dependencies are inferred from the claim text.