Test head and wafer inspection apparatus
AssigneeTokyo Electron Limited
InventorsJunichi Hagihara, Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu
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Abstract
A wafer inspection system is provided. The wafer inspection system comprises: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.
Claims7
A test head that is capable of being accommodated in at least one of a plurality of inspection rooms located between a loader and a maintenance region, and used for inspecting a wafer, comprising:
- a main body formed of a rectangular parallelepiped shape;
- and
- a flange protruding from a side surface of the main body in a longitudinal direction,
- wherein the test head is configured to be unloaded to the maintenance region by the flange supported by a slide rail in the inspection room.
Dependencies are inferred from the claim text.