Semiconductor Device for Determining a Biomolecule Characteristic
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKun-Lung Chen, Tung-Tsun Chen, Cheng-Hsiang Hsieh, Yu-Jie Huang, Jui-Cheng Huang
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Abstract
A semiconductor device includes a circuit layer and a nanopore layer. The nanopore layer is formed on the circuit layer and is formed with a pore therethrough. The circuit layer includes a circuit unit configured to drive a biomolecule through the pore and to detect a current associated with a resistance of the nanopore layer, whereby a characteristic of the biomolecule can be determined using the currents detected by the circuit unit.
Claims20
A method of manufacturing a semiconductor device, the method comprising:
- forming a circuit layer;
- disposing an unformed nanopore layer above a circuit layer;
- coupling, electrically, the nanopore layer to the circuit layer, the nanopore layer having a nanopore therethrough;
- and
- applying, using the circuit layer, a forming voltage to the nanopore layer thereby forming the nanopore layer, wherein the nanopore is a liquid gated transistor.
A semiconductor device, comprising:
- a circuit layer;
- and
- an unformed nanopore layer disposed above the circuit layer and electrically coupled to the circuit layer, wherein the circuit layer is configured to apply a forming voltage to the nanopore layer thereby forming the nanopore layer, the nanopore layer having a nanopore therethrough, wherein the nanopore is a liquid gated transistor.
A method comprising:
- using a circuit unit within a circuit layer to drive a biomolecule through a nanopore in a nanopore layer above the circuit layer;
- wherein the nanopore is formed by applying a forming voltage to the nanopore layer to form a liquid gated transistor;
- determining a characteristic of the biomolecule by measuring a current using the liquid gated transistor.
Dependencies are inferred from the claim text.