Gas sensor for measuring a concentration of an analysis gas
AssigneeRobert Bosch GmbH
InventorsRenate Mueller, Tobias Sebastian Frey
Life of this patent
Estimating the term…
Loading patent…
AssigneeRobert Bosch GmbH
InventorsRenate Mueller, Tobias Sebastian Frey
Estimating the term…
A gas sensor is described for measuring a concentration of an analysis gas based on a thermal conductivity principle, including at least one analysis heating element situated on a first diaphragm for heating the analysis gas, a reference heating element situated on a second diaphragm for heating a reference gas, at least one evaluation electronics unit for measuring a resistance change of the analysis heating element caused by the analysis gas in relation to an electrical resistance of the reference heating element, the first diaphragm and the second diaphragm being situated adjacent to one another in a sensor substrate, due to a base substrate situated on one side on the sensor substrate, a measuring volume is formable between the first diaphragm and the base substrate and a reference volume is formable between the second diaphragm and the base substrate.
1-12 (canceled)
A gas sensor for measuring a concentration of an analysis gas based on a thermal conductivity principle, the gas sensor comprising:
Dependencies are inferred from the claim text.