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US 2020/0348197 A1Published application
Pressure sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorRyohei HAMAZAKI
Life of this patent
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Abstract
A pressure sensor includes a base, a fixed electrode on the base, a membrane at a distance from and opposite the fixed electrode and having flexibility and conductivity, a dielectric on the fixed electrode and opposite to the membrane, and a contact restrictor to restrict contact between a portion of the dielectric and the membrane by coming in contact with the membrane.
Claims20
A pressure sensor comprising:
- a base;
- a fixed electrode provided on the base;
- a membrane provided at a distance from and opposite to the fixed electrode and having flexibility and conductivity;
- a dielectric provided on the fixed electrode and opposite to the membrane;
- and
- a contact restrictor to restrict contact between a portion of the dielectric and the membrane by coming in contact with the membrane.
3 more elements
Dependencies are inferred from the claim text.