Misalignment detection device and misalignment detection method
AssigneeSCREEN Holdings Co., Ltd.
InventorYasushi Sasa
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AssigneeSCREEN Holdings Co., Ltd.
InventorYasushi Sasa
Estimating the term…
A device includes a storage 52 for storing a reference pattern corresponding to a part of a workpiece outer peripheral part, an imager 27 for imaging the outer peripheral part at least for one turn of a workpiece by such imaging at a fixed point as to include at least a part of the outer peripheral part in an imaging field of view, an image processor 55 for detecting a region corresponding to the reference pattern by performing a pattern matching process, and a misalignment detector 51 for detecting the misalignment based on information on a position of each of a plurality of the detected regions. The reference pattern corresponds in shape to a plurality of characteristic parts that present on the outer peripheral part, have shapes congruent to each other and have a mutually symmetrical positional relationship with respect to rotation about the center axis.
A misalignment detection device that detects a misalignment of a center axis with respect to an axis of rotation when a workpiece having such an outer peripheral shape that a distance in a radial direction from the center axis to an outer peripheral part repeatedly increases and decreases in a circumferential direction rotates about the axis of rotation, the device comprising:
A misalignment detection method that detects a misalignment of a center axis with respect to an axis of rotation when a workpiece having such an outer peripheral shape that a distance in a radial direction from the center axis to an outer peripheral part repeatedly increases and decreases in a circumferential direction rotates about the axis of rotation, the method comprising:
Dependencies are inferred from the claim text.