Large-area high-density plasma processing chamber for flat panel displays

A plate for a lid assembly, the plate comprising:

• a plasma generation system, the plasma generation system comprising one or more cavities disposed in parallel in the plate, each of the cavities comprises:
• recesses for a plurality of dielectric plates;
• and
• one or more coils positioned on or over the plurality of dielectric plates;
• and
• a gas distribution assembly, the gas distribution assembly comprising:
• a first diffuser, the first diffuser comprises one or more first diffuser inlets disposed in the plate and in fluid communication with a plurality of first channels;
• a second diffuser, the second diffuser comprises one or more second diffuser inlets disposed in the plate and in fluid communication with a plurality of second channels;
• wherein:
• each of the second channels is intersecting each of the first channels;
• and
• each of the dielectric plates is disposed adjacent to adjacent first channels and is disposed adjacent to at least one of the second channels.

A chamber, comprising:

• a chamber body;
• a substrate support disposed in the chamber body;
• and
• a lid assembly plate positioned opposite the substrate support, the lid assembly plate and the substrate support defining a processing region in the chamber body, the lid assembly plate comprises:
• a plasma generation system, the plasma generation system comprising one or more cavities disposed in parallel in the lid assembly plate, each of the cavities comprises:
• recesses for a plurality of dielectric plates, each of the dielectric plates having:
• a bottom surface positioned in the processing region;
• and
• a top surface positioned outside the processing region;
• and
• one or more coils positioned on or over the plurality of dielectric plates;
• and
• a gas distribution assembly, the gas distribution assembly comprising a first diffuser, the first diffuser comprises:
• one or more first diffuser inlets disposed in the lid assembly plate;
• and
• a plurality of first channels in fluid communication with at least one of the first diffuser inlets, each first channel of the plurality of first channels is disposed in the lid assembly plate and is adjacent to one of the recesses.