Resin composition for insulating film
AssigneeNissan Chemical Corporation
InventorsTakuya OHASHI, Yosuke IINUMA, Hayato HATTORI, Yuki USUI, Kazuhiro SAWADA
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AssigneeNissan Chemical Corporation
InventorsTakuya OHASHI, Yosuke IINUMA, Hayato HATTORI, Yuki USUI, Kazuhiro SAWADA
Estimating the term…
A resin composition which is for an insulating film and from which a cured product having a further reduced dielectric constant and dielectric loss tangent is obtained; a photosensitive resin composition; a method for producing a cured relief pattern using the photosensitive resin composition; and a semiconductor device with the cured relief pattern. This resin composition for an insulating film includes: a polyimide precursor; and a compound which is a polyimide precursor containing a polyamic acid ester, a thermal imidization accelerator, and a solvent, wherein the thermal imidization accelerator has a carboxyl group and an amino group or imino group which is deprotected by heat and exhibits basicity, and does not accelerate the imidization of the polyimide precursor before the protective group is released. Furthermore, a photosensitive resin composition which is for an insulating film and includes a photopolymerization initiator.
A resin composition for an insulating film, the resin composition comprising:
A resin film for an insulating film, which is a baked product of an applied film comprising a resin composition for an insulating film, the resin composition comprising:
Dependencies are inferred from the claim text.