End point detection method, polishing apparatus, and polishing method

An end point detection method based on a drive current supplied to a drive unit that rotates and drives one of a polishing table that holds a polishing pad and a holding unit that holds a polishing target and presses the polishing target against a polishing pad, the end point detection method comprising:

• a first determination step of determining whether a polishing condition of a polishing process to be executed coincides with a preset specific polishing condition;
• an adjustment step of adjusting a current control parameter in a drive control unit that controls the drive current, the current control parameter related to a change in the drive current with respect to a change in a driving load of the drive unit, if it is determined in the first determination step that the polishing condition coincides with the specific polishing condition;
• a detection step of detecting the drive current supplied to the drive unit based on the current control parameter adjusted in the adjustment step;
• and
• an end point detection step of detecting an end point of polishing based on the drive current detected in the detection step.