Sterilized-liquefied gas apparatus and connectin pipe thereof
AssigneeUlvac, Inc.
InventorTsuyoshi YOSHIMOTO
Life of this patent
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Abstract
A sterilized-liquefied gas apparatus of the invention includes: a liquefied gas reservoir; a source-gas supplier that supplies a source gas to the liquefied gas reservoir; a cooler that cools down an inside of the liquefied gas reservoir and thereby liquefies the source gas; a supply pipe that connects the source gas supplier and the liquefied gas reservoir; a sterilization filter provided in the supply pipe; a sterilizer that sterilizes, by a sterilizing gas, a sterilization region that is located further downstream than the sterilization filter; and a sterilizing-gas remover that removes the sterilizing gas after sterilization.
Claims8
A sterilized-liquefied gas apparatus, comprising:
- a liquefied gas reservoir;
- a source-gas supplier that supplies a source gas to the liquefied gas reservoir;
- a cooler that cools down an inside of the liquefied gas reservoir to liquefy the source gas;
- a supply pipe that connects the source-gas supplier and the liquefied gas reservoir;
- a sterilization filter provided at the supply pipe;
- a sterilizer that sterilizes a sterilization region by a sterilizing gas, the sterilization region being located further downstream than the sterilization filter;
- and
- a sterilizing-gas remover that removes the sterilizing gas after sterilization.
A connecting pipe to be connected to a liquefied gas reservoir and a liquefied-gas supply object, the connecting pipe comprising:
- a connection portion that is connectable to the liquefied gas reservoir and the liquefied-gas supply object;
- and
- a valve capable of being hermetically-sealed, wherein
- in a state where an inside of the connecting pipe is hermetically sealed by the valve, the connecting pipe is connected to a vacuum pumping device that is capable of discharging gas inside the connecting pipe, and
- the connecting pipe is connected to a sterilizer that is capable of supply a sterilizing gas to an inside of the connecting pipe in a state where gas is discharged therefrom.
Dependencies are inferred from the claim text.