System and method for dispatching lot
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRen-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Yuang-Tsung CHEN
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Abstract
A method is disclosed that includes the operations below: determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer; comparing, by the processing unit, idle times of multiple tools in the N process stages; and processing the lot with a first tool of the tools at each one of the N process stages, wherein the first tool of the tools has a shortest idle time.
Claims20
A method, comprising:
- determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer;
- comparing, by the processing unit, idle times of a plurality of tools in the N process stages;
- and
- processing the lot with a first tool of the plurality of tools at each one of the N process stages, wherein the first tool of the plurality of tools has a shortest idle time.
A system, comprising:
- a plurality of tools in a plurality of process stages, wherein the plurality of tools are configured to process a lot;
- and
- a processing unit configured to assign an idle tool of the plurality of tools in each of the plurality of the process stages,
- wherein when first and second tools of the plurality of tools in one of the process stages are idle as the lot arrives, the processing unit is further configured to assign, according to a shortest idle time of the first and second tools, the first tool in the plurality of tools to process the lot.
A non-transitory computer readable medium for performing a method, the method comprising:
- determining, by a processing unit, whether a plurality of tools are idle when a super hot run (SHR) arrives at a process stage;
- in response to determining, comparing a first idle time of a first tool with a second idle time of a second tool in the plurality of tools before the super hot run arrives;
- and
- when the first idle time is shorter than the second idle time, assigning the first tool of the plurality of tools to process the super hot run.
Dependencies are inferred from the claim text.