Defect measurement device, defect measurement method, and inspection probe
AssigneeSumitomo Chemical Company, Limited
InventorsToyokazu TADA, Hidehiko SUETSUGU
Life of this patent
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Abstract
An inspection probe (100) includes a Hall element (3) which detects the density of magnetic flux flowing in a magnetic circuit formed by a yoke (1), a magnet (2), and a magnetic pipe (P). A second outer circumferential surface (12a) of the yoke (1) is arranged to be located closer to the magnetic pipe (P) than a first outer circumferential surface (11a) of the yoke (1) is to the magnetic pipe (P).
Claims8
A defect measuring device for measuring a defect of a magnetic member so as to inspect the defect, the defect measuring device comprising:
- an inspection probe including
- a magnet,
- a yoke configured to be located on the opposite side of the magnet from the magnetic member, and
- a magnetic sensor which is configured to be located between the yoke and the magnetic member and which is configured to detect a density of magnetic flux flowing in a magnetic circuit, the magnetic circuit being formed by the magnet, the yoke, and the magnetic member;
- and
- a calculating section configured to calculate a depth of the defect of the magnetic member based on an output from the magnetic sensor,
- the yoke having a first counter surface and a second counter surface, the first counter surface being arranged to face the magnetic member with the magnet interposed between the first counter surface and the magnetic member, the second counter surface being arranged to face the magnetic member with the magnetic sensor interposed between the second counter surface and the magnetic member,
- the second counter surface being arranged to be located closer to the magnetic member than the first counter surface is to the magnetic member.
An inspection probe configured to inspect a defect of a magnetic member, the inspection probe comprising:
- a magnet;
- a yoke configured to be located on the opposite side of the magnet from the magnetic member;
- and
- a magnetic sensor which is configured to be located between the yoke and the magnetic member and which is configured to detect a density of magnetic flux flowing in a magnetic circuit, the magnetic circuit being formed by the magnet, the yoke, and the magnetic member,
- the yoke having a first counter surface and a second counter surface, the first counter surface being arranged to face the magnetic member with the magnet interposed between the first counter surface and the magnetic member, the second counter surface being arranged to face the magnetic member with the magnetic sensor interposed between the second counter surface and the magnetic member,
- the second counter surface being arranged to be located closer to the magnetic member than the first counter surface is to the magnetic member.
Dependencies are inferred from the claim text.