Integrated sensor apparatus with pressure sensing element and flow sensing element
AssigneeHoneywell International Inc.
InventorsRichard Charles Sorenson, Steven Lowery, Ian Bentley
Life of this patent
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Abstract
An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.
Claims20
An apparatus, comprising:
- a substrate;
- a cover member comprising a flow tunnel, wherein the cover member is disposed on the substrate and configured to enable a gaseous substance to flow through the flow tunnel;
- a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel and configured for sensing a flow rate of the gaseous substance through the flow tunnel;
- and
- a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel and configured for sensing a pressure of gaseous substance in the flow tunnel.
A system for calculating a thermal conductivity of a gaseous substance, the system comprising:
- a flow sensing element disposed on a substrate, wherein the flow sensing element is exposed to the gaseous substance;
- a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance;
- and
- a processing circuitry disposed on the substrate, wherein the processing circuitry is electronically coupled to the flow sensing element and the pressure sensing element.
Dependencies are inferred from the claim text.