Inspection device, inspection method, and method for producing object to be inspected

An inspection method comprising:

• irradiating an object to be inspected with an energy ray from a ray source;
• detecting an energy ray having passed through the object to be inspected using a detection unit;
• generating an internal image of the object to be inspected based on a detection amount distribution of the energy ray detected by the detection unit;
• and
• setting the object to be inspected and the ray source by displacing, based on the detection amount distribution of the energy ray detected by the detection unit, at least one of the object to be inspected and the ray source relative to the other of the object to be inspected and the ray source, using a displacement mechanism.

An inspection method comprising:

• irradiating an object to be inspected with an energy ray from a ray source;
• detecting an energy ray having passed through the object to be inspected using a detection unit;
• setting a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other of the object to be inspected and the ray source, using a displacement mechanism;
• generating an internal image of the object to be inspected based on a detection amount distribution of the energy ray detected by the detection unit;
• and
• controlling the displacement mechanism based on the detection amount distribution of the energy ray detected by the detection unit.

An inspection device comprising:

• a ray source that irradiates an object to be inspected with an energy ray, the object to be inspected including a first member and a second member that has a different absorption coefficient from the first member with respect to the energy ray;
• a detection unit that detects an energy ray having passed through the object to be inspected;
• a displacement mechanism that displaces at least one of the object to be inspected and the ray source in relation to the other of the object to be inspected and the ray source;
• and
• a control unit that controls the displacement mechanism so as to obtain a position in which only the first member of the object to be inspected is detected.

A inspection method comprising:

• irradiating an object to be inspected with an energy ray from a ray source, the object to be inspected including a first member and a second member that has a different absorption coefficient from the first member with respect to the energy ray;
• detecting an energy ray having passed through the object to be inspected;
• displacing at least one of the object to be inspected and the ray source in relation to the other of the object to be inspected and the ray source, using a displacement mechanism;
• and
• controlling the displacement mechanism so as to obtain a position in which only the first member of the object to be inspected is detected.