Vacuum bellows hot valve
AssigneeKitz Sct Corporation
InventorKazuo IIJIMA
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Abstract
Provided is a vacuum bellows hot valve with durability and drivability not impaired by increased temperature and voltage of heating means while having a simple, compact structure, the valve also allowing valve's temperature control with high accuracy. In the vacuum bellows hot valve, a stern is provided inside a valve box with an inflow port and an outflow port so as to freely ascend and descend, a bellows is elastically provided to a valve body provided at a lower end of the stem and on an outer circumferential side, of the stem, a cylindrical ceramic heater is arranged between an inner circumference of the bellows and an outer circumference of the stem, and a temperature measuring part of a thermocouple for control is arranged at a position close to the valve body.
Claims6
A vacuum bellows hot valve in which a stem is provided inside a valve box with a inflow port and an outflow port so as to freely ascend and descend, a bellows is elastically provided to a valve body provided at a lower end of the stem and on an outer circumferential side of the stem, a cylindrical ceramic heater is arranged between an inner circumference of the bellows and an outer circumference of the stem, and a temperature measuring part of a thermocouple for control is arranged at a position close to the valve body.
Dependencies are inferred from the claim text.