Sensor module
AssigneeKabushiki Kaisha Toshiba
InventorsYongfang LI, Takahiro Omori, Takashi Usui, Osamu Nishimura, Kazuo Watabe
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Abstract
According to one embodiment, a sensor module includes at least one sensor and at least one switch. The sensor includes a first piezoelectric element. The first piezoelectric element includes a first electrode. The first piezoelectric element is set with a resonance frequency to resonate at a vibration frequency of a detection target. The switch includes a second piezoelectric element. The second piezoelectric element includes a second electrode connected to the first electrode and a third electrode electrically separated from the second electrode.
Claims11
A sensor module comprising:
- at least one sensor comprising a first piezoelectric element, the first piezoelectric element including a first electrode and set with a resonance frequency to resonate at a vibration frequency of a detection target;
- and
- at least one switch comprising a second piezoelectric element, the second piezoelectric element including a second electrode connected to the first electrode and a third electrode electrically separated from the second electrode.
Dependencies are inferred from the claim text.