Ultrasonic probe and method for manufacturing same
AssigneeHitachi, Ltd.
InventorsTakayuki Iwashita, Takashi Fujii, Kazuho Yoshimura, Toru Watanabe
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Abstract
A second stacked product is configured with a flexible wiring sheet, and a stacked-element array supported by the flexible wiring sheet. To a biological-body side of the stacked-element array, a ground film is bonded, whereby a structurally reinforced third stacked product is produced. Then, the third stacked product is bent, whereby a curved stacked product is produced. In the bending procedure, in the ground film, a plurality of extension parts arranged along the θ direction are automatically formed.
Claims6
An ultrasonic probe comprising:
- a plurality of stacked elements arranged two-dimensionally along a curved surface;
- and
- a ground film provided on the biological-body sides of the plurality of stacked elements,
- wherein the plurality of stacked elements are separated from one another by a plurality of groove parts arranged along the curvature direction of the curved surface, and
- the ground film includes:
- a plurality of adhesion parts bonded to the biological-body sides of the plurality of stacked elements;
- and
- a plurality of extension parts provided on the biological-body sides of the plurality of groove parts and arranged along the curvature direction, and
- at least a part of each of the extension parts constitutes a thin part.
A method for manufacturing an ultrasonic probe, comprising:
- a step of performing two-dimensional dicing on a first stacked product including a flexible wiring sheet, a transducing layer, and a matching layer, thereby producing a second stacked product including the flexible wiring sheet and a plurality of stacked elements supported by the flexible wiring sheet;
- a step of bonding a ground film on the biological-body sides of the plurality of stacked elements, thereby producing a third stacked product;
- a step of pressing the third stacked product against a convex curved surface of a backing member, thereby producing a curved stacked product;
- and
- a step of disposing a transducer assembly including the curved stacked product and the backing member inside a probe case.
Dependencies are inferred from the claim text.