# US 2020/0286979 A1 · Display panel having improved conductive layer and manufacturing method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2020/0286979 A1 - Document ID: US20200286979A1 - Status: Published application - Kind: A1 - Application number: 16/880,001 - Filed: 2020-05-21 - Published: 2020-09-10 - Earliest claimed: 2017-12-05 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Ki Hyun KIM; Young Gil PARK; Sung Chan JO - Web page: https://patentgrep.com/patent/US20200286979A1 ## CPC - H10K 59/1315: {comprising structures specially adapted for lowering the resistance} - H10D 86/411: {characterised by materials, geometry or structure of the substrates} - H10D 86/441: {Interconnections, e.g. scanning lines} - H10D 86/60: wherein the TFTs are in active matrices - H10K 59/1213: {the pixel elements being TFTs} - H10K 59/123: Connection of the pixel electrodes to the thin film transistors [TFT] - H10K 59/124: Insulating layers formed between TFT elements and OLED elements - H10D 86/481: {integrated with passive devices, e.g. auxiliary capacitors} - H10K 59/1201: {Manufacture or treatment} - H10K 2101/80: {Composition varying spatially, e.g. having a spatial gradient} - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract A display panel includes a first conductive layer including a first layer, a second layer, and a third layer sequentially stacked, and a second conductive layer on the first conductive layer and contacting the third layer. The first layer includes a first metal. The second layer includes the first metal and oxygen in a first composition ratio. The third layer includes the first metal and oxygen at a second composition ratio. The second composition ratio is smaller than the first composition ratio. Conductivity of the third layer is higher than conductivity of the second layer. The first composition ratio is a ratio of an atom percent of the first metal to an atom percent of oxygen in the second layer. The second composition ratio is a ratio of an atom percent of the first metal to an atom percent of oxygen in the third layer. ## Claims ### Claim 1 A display panel, comprising: a first conductive layer including a first layer, a second layer, a third layer, a fourth layer, and a fifth layer that are sequentially stacked; and a second conductive layer disposed on the first conductive layer and in contact with the fifth layer, wherein the first layer and the third layer include a first metal, the second layer includes a second metal that is different from the first metal, the fourth layer includes the first metal and oxygen in a first composition ratio, the fifth layer includes the first metal and oxygen in a second composition ratio, the first composition ratio and the second composition ratio are different from each other. ### Claim 2 (depends on 1) The display panel as claimed in claim 1, wherein: conductivity of the fifth layer is higher than conductivity of the fourth layer. ### Claim 3 (depends on 1) The display panel as claimed in claim 1, wherein: the first composition ratio is a ratio of an atom percent of the first metal to an atom percent of oxygen in the second layer, the second composition ratio is a ratio of an atom percent of the first metal to an atom percent of oxygen in the third layer, and the second composition ratio is smaller than the first composition ratio. ### Claim 4 (depends on 3) The display panel as claimed in claim 3, wherein: the first composition ratio is more than 1.0 and less than or equal to 2.0, and the second composition ratio is equal to or more than 0.8 and less than or equal to 1.0. ### Claim 5 (depends on 3) The display panel as claimed in claim 3, wherein an atom percent of oxygen included in the third layer is lower than the atom percent of oxygen included in the fourth layer. ### Claim 6 (depends on 5) The display panel as claimed in claim 5, further comprising: a substrate under the first conductive layer; and an underlying layer between the substrate and the first conductive layer, wherein the first layer contacts the underlying layer. ### Claim 7 (depends on 6) The display panel as claimed in claim 6, wherein the atom percent of oxygen included in the third layer is between the atom percent of oxygen included in the fourth layer and an atom percent of oxygen included in the first layer. ### Claim 8 (depends on 6) The display panel as claimed in claim 6, wherein a thickness of the second layer is greater than a thickness of the third layer or the first layer. ### Claim 9 (depends on 3) The display panel as claimed in claim 3, wherein the first metal is titanium (Ti). ### Claim 10 (depends on 3) The display panel as claimed in claim 3, further comprising: an insulating layer between the first conductive layer and the second conductive layer, wherein the insulating layer includes a contact hole on the first conductive layer, the fifth layer includes a first portion and a second portion, the first portion being located corresponding to the contact hole and not overlapping the insulating layer, the second portion being connected to the first portion and located between the insulating layer and the fourth layer, and a thickness of the second portion is equal to or less than a thickness of the first portion. ### Claim 11 (depends on 10) The display panel as claimed in claim 10, wherein the thickness of the second portion gradually decreases in relation to a distance from the first portion. ### Claim 12 (depends on 3) The display panel as claimed in claim 3, further comprising: an insulating layer between the first conductive layer and the second conductive layer, wherein the insulating layer includes a contact hole on the first conductive layer, and the fifth layer is located at an area corresponding to the contact hole. ### Claim 13 (depends on 1) The display panel as claimed in claim 1, further comprising: a substrate under the first conductive layer; an active layer between the substrate and the first conductive layer, the active layer including a semiconductor material; at least one first insulating layer between the active layer and the first conductive layer; and a second insulating layer between the first conductive layer and the second conductive layer, wherein the first conductive layer is electrically connected to the active layer through a first contact hole included in the at least one first insulating layer, and the second conductive layer contacts the fifth layer through a second contact hole included in the second insulating layer. ### Claim 14 (depends on 3) The display panel as claimed in claim 3, wherein: one of the fourth layer and the fifth layer is amorphous, and another of the fourth layer and the fifth layer is crystalline. ### Claim 15 (depends on 1) The display panel as claimed in claim 1, wherein the second conductive layer comprises: a first layer disposed directly on the fifth layer of the first conductive layer, a second layer disposed on the first layer of the second conductive layer, and a third layer disposed on the second layer of the second conductive layer. ### Claim 16 (depends on 15) The display panel as claimed in claim 15, wherein the first layer of the second conductive layer and the third layer of the second conductive layer include a transparent conductive material, the second layer of the second conductive layer includes a third metal that is different from the first metal and the second metal. ### Claim 17 (depends on 16) The display panel as claimed in claim 16, wherein the first metal is titanium (Ti), the second metal is aluminum (Al), and the third metal is silver (Ag). ### Claim 18 (depends on 17) The display panel as claimed in claim 17, wherein the fourth layer is titanium oxide of TiOx, and the fifth layer is titanium oxide of TiO. ### Claim 19 (depends on 18) The display panel as claimed in claim 18, wherein the transparent conductive material is ITO.