# US 2020/0286708 A1 · Multi-cell detector for charged particles > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2020/0286708 A1 - Document ID: US20200286708A1 - Status: Published application - Kind: A1 - Application number: 16/652,398 - Filed: 2018-09-28 - Published: 2020-09-10 - Earliest claimed: 2017-09-29 - Assignees: ASML Netherlands B.V. - Applicants: ASML Netherlands B.V. - Inventors: Joe WANG; Yongxin WANG; Zhong-wei CHEN; Xuerang HU - Web page: https://patentgrep.com/patent/US20200286708A1 ## CPC - H01J 37/244: Detectors; Associated components or circuits therefor - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H10F 39/191: {Photoconductor image sensors} - H10F 39/803: {Pixels having integrated switching, control, storage or amplification elements} - H01J 2237/04756: with electrostatic means - H01J 2237/2441: Semiconductor detectors, e.g. diodes - H01J 2237/2446: Position sensitive detectors - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers. ## Claims ### Claim 1 A substrate comprising: a first layer including a first region of a first conductivity type; a second layer that includes a plurality of second regions of a second conductivity type and one or more third regions of the first conductivity type, wherein the plurality of second regions are partitioned from one another by the one or more third regions; and an intrinsic layer between the first layer and the second layer, wherein the first layer is configured to receive a plurality of secondary electron beams generated from a sample surface. ### Claim 2 (depends on 1) The substrate of claim 1, wherein the first conductivity type is p-type semiconductor and the second conductivity type is n-type semiconductor, and wherein the plurality of second regions are spaced apart from the one or more third regions. ### Claim 3 (depends on 1) The substrate of claim 1, wherein the second layer further includes an intrinsic region separating each of the plurality of second regions from the one or more third regions of the second layer. ### Claim 4 (depends on 1) The substrate of claim 1, wherein each of the plurality of second regions is surrounded by the intrinsic region in the second layer. ### Claim 5 (depends on 1) The substrate of claim 1, wherein a width of the plurality of second regions is greater than a width of the one or more third regions. ### Claim 6 (depends on 1) The substrate of claim 1, wherein the intrinsic layer is n-doped, wherein the intrinsic layer has a doping concentration lower than doping concentrations of the first region, the plurality of second regions, and the one or more third regions. ### Claim 7 (depends on 1) The substrate of claim 1, wherein the intrinsic layer is p-doped, wherein the intrinsic layer has a doping concentration lower than doping concentrations of the first region, the plurality of second regions, and the one or more third regions. ### Claim 8 (depends on 1) The substrate of claim 1, wherein: the first region is coated with a first metal; and the plurality of second regions and the one or more third regions are coated with a second metal. ### Claim 9 (depends on 8) The substrate of claim 8, wherein atomic number of the first metal is smaller than atomic number of the second metal. ### Claim 10 (depends on 8) The substrate of claim 8, wherein the first metal is aluminum. ### Claim 11 (depends on 8) The substrate of claim 8, wherein the second metal is gold. ### Claim 12 (depends on 8) The substrate of claim 8, further comprising: an insulating layer that is deposited on the second metal and that covers gaps between the plurality of second regions and the one or more third regions of the second layer. ### Claim 13 (depends on 1) The substrate of claim 1, further comprising: a plurality of signal output lines connected to the plurality of second regions. ### Claim 14 An apparatus comprising: a charged particle source configured to generate one or more charged particle beams; a detector comprising: a first layer including a first region of a first conductivity type, a second layer including a plurality of second regions of a second conductivity type, wherein the plurality of second regions are partitioned from one another, and an intrinsic layer between the first layer and the second layer, wherein the plurality of second regions are configured to output electrical signals based on received charged particles, and wherein the first layer is configured to receive a plurality of secondary electron beams generated from a sample surface; and an amplifier configured to amplify the electrical signals outputted by the plurality of second regions and to forward the amplified electrical signals to a controller. ### Claim 15 A method comprising: applying a first bias to a first region of a first conductivity type of a first layer of a detector and second bias to a plurality of second regions of a second conductivity type of a second layer of the detector, the detector including an intrinsic region between the first layer and the second layer, wherein the plurality of second regions are partitioned from one another by a partition region, and wherein the first layer is configured to receive a plurality of secondary electron beams generated from a sample surface; receiving an output signal from the second layer; and determining a charged particle signal based on the received output signal.