Analysis Device and Spectrum Generation Method
AssigneeJEOL Ltd.
InventorTakanori Murano
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AssigneeJEOL Ltd.
InventorTakanori Murano
Estimating the term…
An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.
An analysis device comprising:
A spectrum generation method executed in an analysis device including a spectroscopic element that diffracts a signal generated by a specimen, and a detector in which detection regions used to detect the signal diffracted by the spectroscopic element are arranged in a plurality of rows and a plurality of columns,
Dependencies are inferred from the claim text.