Sputtering system and method
AssigneeAgency for Science, Technology and Research
InventorsJianwei Chai, Shijie Wang, Dongzhi Chi, Ming Yang
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Abstract
A sputtering system and a sputtering method are provided. The sputtering system includes a first electrode, a magnet and a second electrode. The first electrode is an elongated tube having a first end and a second end downstream of the first end. The first end is configured to receive a gas flow and the second end is placed next to a substrate. The magnet surrounds at least a portion of the elongated tube and is configured to generate a magnetic field in a space within the elongated tube. The second electrode is disposed within the elongated tube. A voltage is configured to be applied between the first and second electrodes to generate an electric field between the first and second electrodes.
Claims20
A sputtering system comprising:
- a first electrode comprising an elongated tube having a first end and a second end downstream of the first end, wherein the first end is configured to receive a gas flow and the second end is placed next to a substrate;
- a magnet surrounding at least a portion of the elongated tube and configured to generate a magnetic field in a space within the elongated tube;
- and
- a second electrode disposed within the elongated tube,
- wherein a voltage is configured to be applied between the first and second electrodes to generate an electric field between the first and second electrodes.
A sputtering method comprising:
- providing a sputtering system, the system comprising:
- a first electrode comprising an elongated tube having a first end and a second end downstream of the first end, wherein the second end is disposed adjacent a substrate;
- a magnet surrounding at least a portion of the elongated tube;
- and
- a second electrode disposed within the elongated tube;
- generating a sputtered material, wherein generating comprises:
- generating a magnetic field in a space within the elongated tube using the magnet;
- applying a voltage between the first and second electrodes to generate an electric field between the first and second electrodes;
- and
- supplying a gas flow to the first end of the elongated tube to generate a discharge;
- and
- depositing the generated sputtered material exiting the second end of the elongated tube onto the substrate.
Dependencies are inferred from the claim text.