Valve control apparatus and vacuum valve
AssigneeShimadzu Corporation
InventorJunichiro KOZAKI
Life of this patent
Estimating the term…
Abstract
A valve control apparatus comprises: a generator configured to generate a first set pressure signal; and a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the first valve opening control, perform the second valve opening control performing feedback control on the basis of a difference between the first set pressure signal and the chamber pressure. The generator generates the first set pressure signal on the basis of a first set pressure locus converging from the chamber pressure at the time of switching from the first valve opening control to the second valve opening control to the target pressure with a predetermined time constant.
Claims7
A valve control apparatus that performs first valve opening control and second valve opening control in succession on a vacuum valve between a vacuum chamber and a vacuum pump, and controls a chamber pressure of the vacuum chamber to a target pressure, the valve control apparatus comprising:
- a generator configured to generate a first set pressure signal;
- and
- a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the first valve opening control, perform the second valve opening control performing feedback control on the basis of a difference between the first set pressure signal and the chamber pressure, wherein
- the generator generates the first set pressure signal on the basis of a first set pressure locus converging from the chamber pressure at the time of switching from the first valve opening control to the second valve opening control to the target pressure with a predetermined time constant.
Dependencies are inferred from the claim text.