Vertical chemiresistor gas sensor
AssigneeSumitonmo Chemical Company Limied
InventorsDaniel Tobjork, Richard J. Wilson
Life of this patent
Estimating the term…
Loading patent…
AssigneeSumitonmo Chemical Company Limied
InventorsDaniel Tobjork, Richard J. Wilson
Estimating the term…
A sensor for detecting and measuring a gas in a gaseous environment where the gaseous environment contains an interferent such as a related gas. A vertical chemiresistor with a top gate includes a semiconductor layer that has a bulk resistivity that changes in the presence of the gas and/or the interferent. The electrodes (103, 107) of the vertical chemiresistor have a work function that changes when the gas is absorbed onto the electrode. This absorption changes the work function of the electrode and thereby the contact resistance of the electrode in the vertical chemiresistor. By detecting changes in the contact resistance and the bulk resistivity of the semiconducting layer (105) the presence and the concentration of the gas may be determined and distinguished from the interferent.
A gas sensor comprising:
(canceled)
14-15. (canceled)
A method of detecting a first gas in an environment containing a second gas, comprising:
Dependencies are inferred from the claim text.