Vacuum pump and control method therefor

Abstract

A vacuum pump according to an embodiment of the present invention includes a pump main body, a first temperature sensor, a motor, and a control unit. The pump main body includes a rotary shaft and a metal casing portion. The first temperature sensor is attached to the casing portion and detects a temperature of the casing portion. The motor includes a rotor core including a permanent magnet and attached to the rotary shaft, a stator core including a plurality of coils, and a can that houses the rotor core. The control unit includes a driving circuit and a correcting circuit. The driving circuit supplies the plurality of coils with a driving signal for rotating the motor on a basis of a pre-set induced voltage constant. The correcting circuit corrects the induced voltage constant on a basis of an output of the first temperature sensor.

Dependencies are inferred from the claim text.