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US 2020/0270753 A1Published application
Semiconductor manufacturing apparatus member, and display manufacturing apparatus and semiconductor manufacturing apparatus comprising semiconductor manufacturing apparatus member
AssigneeToto Ltd.
InventorsYasutaka NITTA, Takuma WADA
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Abstract
According to one embodiment, a semiconductor manufacturing apparatus member includes a base and a particle-resistant layer. The base includes a main portion and an alumite layer. The main portion includes aluminum. The alumite layer is provided at a front surface of the main portion. The particle-resistant layer is provided on the alumite layer and includes a polycrystalline ceramic. An Al purity of the main portion is 99.00% or more.
Claims10
A semiconductor manufacturing apparatus member, comprising:
- a base including a main portion which includes aluminum and an alumite layer provided at a front surface of the main portion;
- and
- a particle-resistant layer provided on the alumite layer and which includes a polycrystalline ceramic,
- wherein an Al purity of the main portion is 99.00% or more.
1 more element
Dependencies are inferred from the claim text.