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US 2020/0270744 A1Published application
Systems and methods for vaporization and vapor distribution
AssigneeFirst Solar, Inc.
InventorsZhigang Ban, John Barden, Jerry Drennan, Litian Liu, Rick Powell, Nirav Vora, Yaojun Xu
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Abstract
Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.
Claims20
A distributor assembly comprising:
- a vaporizer for vaporizing a semiconductor powder into a semiconductor vapor;
- a manifold comprising a channel bounded by an inner surface of the manifold, and a nozzle extending through the inner surface and an outer surface of the manifold, wherein the channel receives the semiconductor vapor from the vaporizer, and the semiconductor vapor flows from the channel and through the nozzle;
- and
- a heater configured to heat the manifold, wherein the manifold is positioned between the vaporizer and the heater.
1 more element
20-38. (canceled)
Dependencies are inferred from the claim text.