Deposition source evaporating apparatus and manufacturing method thereof
AssigneeSamsung Display Co., Ltd.
InventorsByounggu An, Kyunghan Kim, Mincheol Cha, Jaemork Park, Wonseok Cho, Kichae Jung, Yunhyung Cho
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Abstract
A deposition source evaporating apparatus includes a crucible set for accommodating a deposition source, a spray unit positioned on the crucible set, a heater positioned in the crucible set for heating the crucible set to evaporate the deposition source through the spray unit, and a heat radiation preventing plate surrounding the spray unit for blocking radiation of heat at a side of the spray unit. At least one of the crucible unit and the heat radiation preventing plate includes a carbon fiber composite material.
Claims20
A deposition source evaporating apparatus comprising:
- a first crucible set for accommodating a deposition source;
- a spray unit positioned on the first crucible set;
- a heater positioned in the first crucible set for heating the first crucible set to evaporate the deposition source through the spray unit;
- and
- a heat radiation preventing plate surrounding the spray unit for blocking heat radiation at a side of the first crucible set,
- wherein at least one of the first crucible set and the heat radiation preventing plate comprises a carbon fiber composite material.
A method of manufacturing a deposition source evaporating apparatus, the method comprising:
- preparing a first crucible set for accommodating a deposition source;
- installing a spray unit on the first crucible set;
- installing a heater in the first crucible set;
- and
- installing a heat radiation preventing plate that surrounds the spray unit for blocking heat radiation at a side of first the crucible set,
- wherein at least one of the first crucible set and the heat radiation preventing plate comprises a carbon fiber composite material.
Dependencies are inferred from the claim text.