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US 2020/0270118 A1Published application
Pressure sensor including a microelectromechanical transducer and relating pressure-detection method
AssigneeSTMicroelectronics S.r.l.
InventorMario Giuseppe PAVONE
Life of this patent
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Abstract
A pressure sensor including: a structure which delimits a main cavity of a closed type, the structure being at least partially deformable as a function of a pressure external to the structure; and a MEMS device, which is arranged in the main cavity and generates an output signal, which is of an electrical type and is indicative of the pressure inside the main cavity.
Claims21
A pressure sensor comprising:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including a sealed main cavity;
- and
- a MEMS device arranged in the sealed main cavity and configured to generate an output signal of an electrical type and indicative of a pressure inside the sealed main cavity.
A detection system comprising:
- a pressure sensor that includes:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including a sealed main cavity;
- and
- a MEMS device arranged in the sealed main cavity and configured to generate an output signal of an electrical type and indicative of a pressure inside the sealed main cavity;
- and
- a processing unit configured to determine an estimation of said external pressure based on the output signal.
3 more elements
A method, comprising:
- detecting a pressure exerted on a pressure sensor by a solid body arranged on the pressure sensor, the pressure sensor including:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including a sealed main cavity;
- and
- a MEMS device arranged in the sealed main cavity, wherein the detecting includes:
- the MEMS device detecting a pressure in the sealed main cavity while the solid body exerts the pressure on the pressure sensor, which causes a deformation of the sealed main cavity;
- and
- detecting the pressure exerted by the solid body based the pressure in the sealed main cavity detected by the MEMS device.
4 more elements
Dependencies are inferred from the claim text.