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US 2020/0266019 A1Published application
Plasmonic photocathode emitters at ultraviolet and visible wavelengths
AssigneeKLA Corporation
InventorsKaterina Ioakeimidi, Gildardo R. Delgado, Frances Hill, Gary V. Lopez Lopez, Miguel A. Gonzalez, Alan D. Brodie
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Abstract
A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.
Claims19
A photocathode emitter comprising:
- a transparent substrate;
- a photocathode layer;
- and
- a plasmonic structure array disposed between the transparent substrate and the photocathode layer.
1 more element
A method comprising:
- providing a photocathode, wherein the photocathode includes:
- a transparent substrate;
- a photocathode layer;
- and
- a plasmonic structure array disposed between the transparent substrate and the photocathode layer;
- directing a beam of light at the photocathode;
- and
- generating a beam of electrons from the photocathode.
5 more elements
Dependencies are inferred from the claim text.