Exposure apparatus and exposure method, and flat panel display manufacturing method

An exposure apparatus that irradiates an object with an illumination light via an optical system, comprising:

• a movable body arranged below the optical system that holds the object;
• a drive system that can move the movable body in a first direction and a second direction orthogonal to each other within a predetermined plane orthogonal to an optical axis of the optical system;
• a measurement system in which one of a grating member with a plurality of first grating areas arranged mutually apart in the first direction and a plurality of second grating areas arranged apart from the plurality of first grating areas in the second direction and apart from one another in the first direction and a plurality of heads each irradiating the grating member with a measurement beam that can move in the second direction is provided at the movable body, and the other of the grating member and the plurality of heads is provided facing the movable body, the measurement system having a measurement device that measures position information of the plurality of heads in the second direction, and the measurement system measuring position information of the movable body in at least directions of three degrees of freedom within the predetermined plane, based on measurement information of at least three heads of the plurality of heads irradiating at least two of the plurality of the first grating areas and the plurality of the second grating areas with the measurement beams and measurement information of the measurement device;
• and
• a control system that controls the drive system based on position information measured by the measurement system, wherein
• the control system acquires grating correction information on at least two of the plurality of the first grating areas and the plurality of the second grating areas, based on position information of the movable body measured using at least four heads of the plurality of heads irradiating at least two of the plurality of the first grating areas and the plurality of the second grating areas with the measurement beams, and
• the grating correction information is used to control the movement of the movable body that uses the at least three heads irradiating at least two of the plurality of the first grating areas and the plurality of the second grating areas with the measurement beams.