Detecting device and detecting method and detecting equipment therefor

Abstract

A detecting device and a detecting method thereof and a detecting apparatus are provided. The detecting device includes a stage, a light detection unit and a first, light, source, the stage includes a bearing surface for bearing an object to be detected, the light detection unit is located on a side of the stage, the first light source is located on a side of the stage that is opposite to the light detection unit, and light emitted from the, first light source is at least partially emitted to the light detection unit.

Dependencies are inferred from the claim text.