Duty cycle, depth, and surface energy control in nano fabrication
AssigneeFacebook Technologies, LLC
InventorsNihar Ranjan Mohanty, Matthieu Charles Raoul Leibovici
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Abstract
A surface-relief grating includes a base surface-relief grating comprising a plurality of ridges that include a first material, and a second material on only a top surface or a single sidewall of each ridge of the plurality of ridges, where the second material is different from the first material. A method of fabricating the surface-relief grating includes etching or molding a base surface-relief grating that includes a plurality of ridges, depositing a material layer on the plurality of ridges, and selectively etching the material layer to increase a height or a slant angle of an edge of a ridge in the plurality of ridges to make the surface-relief grating that includes the base surface-relief grating.
Claims20
A method of fabricating a surface-relief grating, the method comprising:
- etching or molding a base surface-relief grating that comprises a plurality of ridges;
- depositing a material layer on the plurality of ridges;
- and
- selectively etching the material layer to change a height or a slant angle of an edge of a ridge in the plurality of ridges to make the surface-relief grating that comprises the base surface-relief grating.
A surface-relief grating comprising:
- a base surface-relief grating including a plurality of ridges that include a first material;
- and
- a second material on only a top surface or only a single sidewall of each ridge of the plurality of ridges, the second material different from the first material.
Dependencies are inferred from the claim text.