Sensor metrology data intergration
AssigneeApplied Materials, Inc.
InventorsSidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil
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AssigneeApplied Materials, Inc.
InventorsSidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Ganesh Balasubramanian, Irfan Jamil
Estimating the term…
Methods, systems, and non-transitory computer readable medium are described for sensor metrology data integration. A method includes receiving sets of sensor data and sets of metrology data. Each set of sensor data includes corresponding sensor values associated with producing corresponding product by manufacturing equipment and a corresponding sensor data identifier. Each set of metrology data includes corresponding metrology values associated with the corresponding product manufactured by the manufacturing equipment and a corresponding metrology data identifier. The method further includes determining common portions between each corresponding sensor data identifier and each corresponding metrology data identifier. The method further includes, for each of the sensor-metrology matches, generating a corresponding set of aggregated sensor-metrology data and storing the sets of aggregated sensor-metrology data to train a machine learning model. The trained machine learning model is capable of generating one or more outputs for performing a corrective action associated with the manufacturing equipment.
A method comprising:
A system comprising:
A non-transitory computer readable medium having instructions stored thereon, which, when executed by a processing device, cause the processing device to:
Dependencies are inferred from the claim text.