Method of manufacturing magnetic sensor and magnetic sensor assembly
AssigneeShowa Denko K.K.
InventorDaizo ENDO
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Abstract
A method of manufacturing a magnetic sensor includes: a soft magnetic material layer deposition process depositing a soft magnetic material layer (101) constituting a sensitive part (21) sensing a magnetic field on a substrate (10) by magnetron sputtering; and a sensitive part formation process forming the sensitive part (21) sensing the magnetic field in a portion of the soft magnetic material layer (101) where uniaxial magnetic anisotropy is provided by a magnetic field used for magnetron sputtering of the soft magnetic material layer (101).
Claims11
1-7. (canceled)
A method of manufacturing a magnetic sensor, the method comprising:
- a soft magnetic material layer deposition process depositing a soft magnetic material layer on a substrate by magnetron sputtering, the soft magnetic material layer constituting a sensitive part sensing a magnetic field;
- and
- a sensitive part formation process forming the sensitive part sensing the magnetic field in a portion of the soft magnetic material layer where uniaxial magnetic anisotropy is provided by a magnetic field used for the magnetron sputtering.
A magnetic sensor assembly comprising:
- a plurality of magnetic sensors, each including a sensitive part sensing a magnetic field, the sensitive part being disposed in the magnetic sensor while reflecting a position of a magnetic field formed in magnetron sputtering used for forming a soft magnetic material layer constituting the sensitive part.
Dependencies are inferred from the claim text.